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EET 2103 Introduction to Vacuum System Technology

In this course, students will be introduced to the operational mechanisms and process use of vacuum pumps used in the semiconductor industry. Students will explain the operational methodology and process use of equipment that require vacuum pumps used in the semiconductor industry. Students will demonstrate problem-solving, critical thinking and communication skills while learning how to perform maintenance on a vacuum system. Two classroom, two lab hours per week.

Division: Science, Technology, Engineering and Mathematics
Department: Electronics Engineering Technology
Repeatable Credit: No
Offered Online: No

Prereqs: NONE  

Outcomes

  • Explain the operational mechanisms and process use of vacuum pumps used in a semiconductor industry
  • Explain the operational methodology and process use of equipment that require vacuum pumps used in the semiconductor industry.
  • Demonstrate the ability to safely test, troubleshoot, and fix a vacuum pump system with a leak using tools while gowned up in a cleanroom environment.

Credit Hours: 3

Classroom Hours: 2
Lab Hours: 2